IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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更新时间：2026-04-02 00:04:49
简称：IEEE T SEMICONDUCT M
ISSN：0894-6507
ESSN：0894-6507
所属分区：3区
出版地：UNITED STATES
出版周期：Quarterly
研究方向：工程技术-工程：电子与电气
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IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING英文简介
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.