JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
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更新时间：2026-04-01 22:04:41
简称：J VAC SCI TECHNOL B
ISSN：1071-1023
ESSN：1071-1023
所属分区：4区
出版地：UNITED STATES
出版周期：Bimonthly
创刊时间：1991
研究方向：工程技术-工程：电子与电气
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B英文简介
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.