Journal of Micro-Nanolithography MEMS and MOEMS
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简称：J MICRO-NANOLITH MEM
ISSN：1932-5150
ESSN：1932-5150
所属分区：0区
出版地：UNITED STATES
出版周期：Quarterly
创刊时间：2007
研究方向：ENGINEERING, ELECTRICAL & ELECTRONIC-NANOSCIENCE & NANOTECHNOLOGY
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Journal of Micro-Nanolithography MEMS and MOEMS英文简介
The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microelectromechanical systems, micro-optoelectromechanical systems, and photonics industries.